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Batch Vacuum Coating System LC-1
 LC-1 is a multi purpose R&D tool. It has two 3” magnetron (DC/RF) sputter guns focused at a temperature controlled (-10 to 200°C) rotating substrate fixture. Maximum substrate size is 4” square. Process control allows excellent coating uniformity below 0.1 %.
The installed ion source can be used for pre-treatment, plasma cleaning and or ion assisted sputtering deposition. Finally at the bottom of the chamber we have thermal evaporation sources. There are four 0-100 MKS MFC’s set up for a variety of gases. LC-1 has a programmable Inficon crystal monitor to control rate.
This system is load locked to keep the main sputter chamber in the low 10-8 Torr range. The load chamber is also equipped with a ceramic infrared substrate heater for outgasing/pre-heating prior to transfer into the main chamber. We have recently added a dry nitrogen glove box to the systems loading chamber that allows us to load substrates directly into the system from a controlled atmosphere.
Typical coatings in this system are TCO’s, optical multi-layers, dense coatings using ion assisted deposition, moisture barriers, optical lens coatings and metallization. This tool can accommodate many unique sized substrates less than 4” in diameter with custom fixtures or masking. Vacuum integrity is maintained with an Alcatel ASM 180 Helium leak detector
System Features:
- 2ea. 3in. magnetron sputter guns
- 1ea.-DC, 1ea.-Pluse DC, 1ea.-RF Power Sources
- Ion Source (Ion assisted sputtering or substrate pre-treatment)
- 2ea. Thermal evaporation sources
- Temperature controlled rotating substrate (-10 to 200°C)
- Acrylic glove box w/load lock attached to load chamber (continuously under dry Nitrogen
atmosphere)
- Substrate transfer mechanism from glove box to load lock to main chamber
- Ceramic Infrared substrate heating in load lock
- 4 MFC’s
- Inficon crystal rate monitor
- Mechanical pump + Leybold chemical service turbo pump (ultimate pressure 10-8)
 LC-2 is a 12” dual drum web coater with 6 deposition stations. We can deposit a variety of materials using different technologies (mostly sputtering) with annual throughput exceeding 200,000 square feet. There are two means of substrate pre-treatment, a conventional glow discharge and a directed high energy plasma beam using various gases. We can deposit on one side only or both sides simultaneously with precisely controlled web tension/speed in both directions. This system's versatility allows us to vary the web path (single side, dual side, continuous loop), vary source to substrate distance, vary target angle and affect film properties and uniformity using a variety of masks and sputter thru slit apertures.
Our in-situ monitoring devices allow us to monitor spectral transmission, reflection as well as sheet resistance.
We have conventional MFC’s along with reactive gas control units that optically monitor or control partial pressures of gases used insuring precise control. Plasma polymerization utilizes a monomer delivery system.
This system is pumped by two HS-20 Varian diffusion pumps backed by a two Stokes 212 mech/blower stacks. We also have two Polycold coils to assist the pumping to an ultimate pressure range of 10-7 Torr in a just a few hours.
Typical coatings in this system include TCO’s, moisture/gas ultrabarriers, customized optical coatings, metallization or specialty coatings.
We have a large amount of designs (especially for optical coatings) immediately available.
Please contact us with your needs!
System Features:
- Up to 6 deposition stations (sputtering, evaporation, PECVD etc.)
- Power Sources:
4ea.-DC 1ea.-Pulse DC, 2ea.-AC-mid frequency
- Plasma treatment with linear ion source
- Glow discharge
- Load cells for web tension control
- Line Speed: 0.1 to 80 mm/sec (bi-directional)
- In-situ spectrometer UV/VIS (reflection/transmission)
- In-situ resistance monitoring capabilities
- Optical emission process control
- 2 chill drums
- 5 Web path configurations (i.e. single side, dual side, continuous loop, single drum)
- 15 channel (0-1000 sccm MKS MFC) w/ gas manifold
- 2ea-HS-20 Varian Diffusion Pumps
- Polycold coil pumping assist.
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